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Tribological behavior of coatings deposited by reactive magnetron sputtering of silicon in acetylene-nitrogen gas mixtures
| Content Provider | Scilit |
|---|---|
| Author | Khrushchov, M. M. Marchenko, E. A. Antonova, O. S. Atamanov, M. V. Petrzhik, M. I. Sulandziga, D. A. |
| Copyright Year | 2019 |
| Description | Journal: Journal of Physics: Conference Series The composition, micromechanical properties and tribological behavior of silicon-based coatings obtained by reactive magnetron sputtering of silicon have been investigated. The results of the friction fatigue tests and the peculiarities of the friction surface failure in several types of vapor-deposited silicon-based coatings have been discussed. |
| Related Links | https://iopscience.iop.org/article/10.1088/1742-6596/1396/1/012022/pdf |
| ISSN | 17426588 |
| e-ISSN | 17426596 |
| DOI | 10.1088/1742-6596/1396/1/012022 |
| Journal | Journal of Physics: Conference Series |
| Issue Number | 1 |
| Volume Number | 1396 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2019-11-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Physics: Conference Series Coatings and Films |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy |