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Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas
| Content Provider | Scilit |
|---|---|
| Author | Zhao, Yan Gao, Wei Xu, Bo Li, Ying-Ai Li, Hong-Dong Gu, Guang-Rui Yin, Hong |
| Copyright Year | 2016 |
| Description | Journal: Chinese Physics B The excellent physical and chemical properties of cubic boron nitride (c-BN) film make it a promising candidate for various industry applications. However, the c-BN film thickness restricts its practical applications in many cases. Thus, it is indispensable to develop an economic, simple and environment-friend way to synthesize high-quality thick, stable c-BN films. High-cubic-content BN films are prepared on silicon (100) substrates by radio frequency (RF) magnetron sputtering from an h-BN target at low substrate temperature. Adhesions of the c-BN films are greatly improved by adding hydrogen to the argon/nitrogen gas mixture, allowing the deposition of a film up to 5-μm thick. The compositions and the microstructure morphologies of the c-BN films grown at different substrate temperatures are systematically investigated with respect to the ratio of $H_{2}$ gas content to total working gas. In addition, a primary mechanism for the deposition of thick c-BN film is proposed. |
| Related Links | http://iopscience.iop.org/article/10.1088/1674-1056/25/10/106801/pdf |
| ISSN | 16741056 |
| e-ISSN | 20583834 |
| DOI | 10.1088/1674-1056/25/10/106801 |
| Journal | Chinese Physics B |
| Issue Number | 10 |
| Volume Number | 25 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2016-09-23 |
| Access Restriction | Open |
| Subject Keyword | Journal: Chinese Physics B Coatings and Films Bn Films Magnetron Sputtering Argon/nitrogen Gas Gas Mixture Working Gas |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy |
