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Local Leakage Current of $HfO_{2}$Thin Films Characterized by Conducting Atomic Force Microscopy
| Content Provider | Scilit |
|---|---|
| Author | Ikeda, Hiroya Goto, Tomokazu Sakashita, Mitsuo Sakai, Akira Zaima, Shigeaki Yasuda, Yukio |
| Copyright Year | 2003 |
| Description | Journal: Japanese Journal of Applied Physics We have characterized the crystallinity and the local leakage current of $HfO_{2}$ thin films microscopically, using conducting atomic force microscopy and transmission electron microscopy. It is clarified that the leakage path depends strongly upon the $HfO_{2}$ crystallographic structures. At 700°C deposition, the $HfO_{2}$ film has mainly polycrystalline columnar grains and stacked polycrystalline grains are scattered on the film. A triplet point at the stacked grains acts as a leakage site, where the thickness for the electron tunneling is effectively reduced. Moreover, in amorphous $HfO_{2}$ deposited at room temperature, applied voltage shift are observed, indicating that positive charges are present at the $HfO_{2}$/Si interface. On the other hand, in the $HfO_{2}$ film deposited at 500°C, in which crystallized grains are scattered in the amorphous structure, no significant conductive region is observed. Therefore, the boundary between crystalline and amorphous regions does not contribute to leakage current. |
| Related Links | http://iopscience.iop.org/article/10.1143/JJAP.42.1949/pdf |
| Ending Page | 1953 |
| Page Count | 5 |
| Starting Page | 1949 |
| ISSN | 00214922 |
| e-ISSN | 13474065 |
| DOI | 10.1143/jjap.42.1949 |
| Journal | Japanese Journal of Applied Physics |
| Issue Number | Part 1, No |
| Volume Number | 42 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2003-04-30 |
| Access Restriction | Open |
| Subject Keyword | Journal: Japanese Journal of Applied Physics Transmission Electron Microscopy Thin Film Fowler Nordheim Tunneling Atomic Force Microscopy Room Temperature Leakage Current |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy Engineering |
