NDLI: Micromachined double backplate differential capacitive microphone

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Micromachined double backplate differential capacitive microphone

Content Provider	Scilit
Author	Bay, Jesper Hansen, Ole Bouwstra, Siebe
Copyright Year	1999
Description	Journal: Journal of Micromechanics and Microengineering A novel design of micromachined capacitive microphone with inherently considerably higher sensitivity than traditional designs is presented in this paper. A process sequence is suggested and means to protect the structure against contamination with dust and humidity are considered. The structure is modelled numerically to calculate the optimum design and to compare with traditional microphone designs.
Related Links	http://iopscience.iop.org/article/10.1088/0960-1317/9/1/003/pdf
Ending Page	33
Page Count	4
Starting Page	30
ISSN	09601317
e-ISSN	13616439
DOI	10.1088/0960-1317/9/1/003
Journal	Journal of Micromechanics and Microengineering
Issue Number	1
Volume Number	9
Language	English
Publisher	IOP Publishing
Publisher Date	1999-01-01
Access Restriction	Open
Subject Keyword	Journal: Journal of Micromechanics and Microengineering Manufacturing Engineering Capacitive Microphone
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Mechanics of Materials Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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