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Imprint Lithography
| Content Provider | Scilit |
|---|---|
| Author | Resnick, Doug Schift, Helmut |
| Copyright Year | 2020 |
| Description | Relative to596 the other lithographic techniques discussed in this book, nanoimprint lithography (NIL) is unusual as high-resolution lithography. Its underlying physical principle of molding a resist by mechanical contact instead of a masked exposure with light or electrons contradicts the credo of modern high-volume lithography of noncontact processing. In fact, its basics are very old, and imprinting (the generation of a topography in a thin layer of resist by molding) as well as printing (the transfer of ink from the surface protrusions of a stamp to a substrate) can be considered established technologies. While Johannes Gutenberg is generally credited with the invention of modern printing, imprinting had already been practiced for centuries in China [1]. As early as 500 BC, there is evidence of carved characters in stone and ceramic. Metal castings were commonly used for diplomatic purposes, and one of the more famous examples is the King of Na gold seal that was presented to Japan from China in the year AD 57. The seal has five Chinese characters, which were associated with the Han Dynasty. As an interesting sidelight, the seal was lost for centuries and accidently discovered by a Japanese farmer in 1784. The seal is now considered a Japanese Treasure and is on display in the Fukuoka prefecture of Japan. Book Name: Microlithography |
| Related Links | https://content.taylorfrancis.com/books/download?dac=C2011-0-03868-5&isbn=9781315117171&doi=10.1201/9781315117171-11&format=pdf |
| Ending Page | 678 |
| Page Count | 84 |
| Starting Page | 595 |
| DOI | 10.1201/9781315117171-11 |
| Language | English |
| Publisher | Informa UK Limited |
| Publisher Date | 2020-05-01 |
| Access Restriction | Open |
| Subject Keyword | Book Name: Microlithography History and Philosophy of Science Lithography Seal Imprinting Molding Characters Centuries Considered Modern |
| Content Type | Text |
| Resource Type | Chapter |