NDLI: Temperature-modulated graphene oxide resistive humidity sensor for indoor air quality monitoring

Content Provider	Royal Society of Chemistry (RSC)
Author	Udrea, F. Ali, S. Z. Gardner, J. W. Santra, S. Ghosh, R. Luca, A. De Guha, P. K.
Copyright Year	2016
Abstract	In this paper we present a temperature-modulated graphene oxide (GO) resistive humidity sensor that employs complementary-metal-oxide-semiconductor (CMOS) micro-electro-mechanical-system (MEMS) micro-hotplate technology for the monitoring and control of indoor air quality (IAQ). GO powder is obtained by chemical exfoliation, dispersed in water and deposited via ink-jet printing onto a low power micro-hotplate. Atomic force microscopy (AFM) and transmission electron microscopy (TEM) show the typical layered and wrinkled morphology of the GO. Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and Fourier transform infra-red (FTIR) spectroscopy indicate that the GO flakes possess a significant number of oxygen containing functional groups (epoxy, carbonyl, hydroxyl) extremely attractive for humidity detection. Electro-thermal characterisation of the micro-hotplates shows a thermal efficiency of 0.11 mW per °C, resulting in a sensor DC power consumption of only 2.75 mW at 50 °C. When operated in an isothermal mode, the sensor response is detrimentally affected by significant drift, hysteretic behaviour, slow response/recovery times and hence poor RH level discrimination. Conversely, a temperature modulation technique coupled with a differential readout methodology results in a significant reduction of the sensor drift, improved linear response with a sensitivity of 0.14 mV per %, resolution below 5%, and a maximum hysteresis of ±5%; response and recovery times equal to 189 ± 49 s and 89 ± 5 s, respectively. These performance parameters satisfy current IAQ monitoring requirements. We have thus demonstrated the effectiveness of integrating GO on a micro-hotplate CMOS-compatible platform enabling temperature modulation schemes to be easily applied in order to achieve compact, low power, low cost humidity IAQ monitoring.
Starting Page	4565
Ending Page	4572
Page Count	8
File Format	HTM / HTML PDF
ISSN	20403364
Volume Number	8
Issue Number	8
Journal	Nanoscale
DOI	10.1039/c5nr08598e
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Open
Subject Keyword	Microelectromechanical systems Spectroscopy Isothermal process Oxygen Epoxy Fourier transform Photoemission spectroscopy Raman spectroscopy CMOS Hydroxy group Transmission electron microscopy Fourier Atomic-force microscopy Graphene Humidity Raman Carbonyl group Thermal efficiency X-ray photoelectron spectroscopy Hysteresis Indoor air quality
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology

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