NDLI: How do the electron beam writing and metal deposition affect the properties of graphene during device fabrication?

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Advances in chitosan-based drug delivery vehicles

Dimension-tailored functional graphene structures for energy conversion and storage

Surface-functionalized nanoparticles for biosensing and imaging-guided therapeutics

Environmental applications using graphene composites: water remediation and gas adsorption

Seed-mediated growth of noble metal nanocrystals: crystal growth and shape control

An artificial muscle model unit based on inorganic nanosheet sliding by photochemical reaction

Nanocellulose electroconductive composites

One-pot synthesis of branched palladium nanodendrites with superior electrocatalytic performance

Boosting nanodiamond fluorescence: towards development of brighter probes

Synthesis and characterization of poly(3-hexylthiophene)-functionalized siloxane nanoparticles

Targeted delivery of CuS nanoparticles through ultrasound image-guided microbubble destruction for efficient photothermal therapy

Shell crosslinked knedel-like nanoparticles for delivery of cisplatin: effects of crosslinking

A single-molecule force spectroscopy study of the interactions between lectins and carbohydrates on cancer and normal cells

Sol–gel nanoglues for an organic binder-free TiO₂ nanofiber anode for lithium ion batteries

Bottom-up synthesis of Zn_1.7GeN_1.8O nanoparticles for photocatalytic application

Slight temperature changes affect protein affinity and cellular uptake/toxicity of nanoparticles

All-solid-state hybrid solar cells based on a new organometal halide perovskite sensitizer and one-dimensional TiO₂ nanowire arrays

Insights into the nature of plasmon-driven catalytic reactions revealed by HV-TERS

Synthesis of ligand-functionalized water-soluble [¹⁸F]YF₃ nanoparticles for PET imaging

Effect of voltage polarity and amplitude on electroforming of TiO₂ based memristive devices

Gram-scale synthesis of ultrasmall SnO₂ nanocrystals with an excellent electrochemical performance

Formation of silicon nanoparticles by a pressure induced nucleation mechanism

A combined size sorting strategy for monodisperse plasmonic nanostructures

Sulfur–nitrogen co-doped three-dimensional carbon foams with hierarchical pore structures as efficient metal-free electrocatalysts for oxygen reduction reactions

Near-infrared light controlled photocatalytic activity of carbon quantum dots for highly selective oxidation reaction

A SnO₂@carbon nanocluster anode material with superior cyclability and rate capability for lithium-ion batteries

Emergent properties and trends of a new class of carbon nanocomposites: graphene nanoribbons encapsulated in a carbon nanotube

Heterostructured Ag₃PO₄/AgBr/Ag plasmonic photocatalyst with enhanced photocatalytic activity and stability under visible light

Nanoamplifiers synthesized from gadolinium and gold nanocomposites for magnetic resonance imaging

Solution equilibrium behind the room-temperature synthesis of nanocrystalline titanium dioxide

A detailed study of gold-nanoparticle loaded cells using X-ray based techniques for cell-tracking applications with single-cell sensitivity

Temperature tuned defect induced magnetism in reduced graphene oxide

How do the electron beam writing and metal deposition affect the properties of graphene during device fabrication?

Enhanced visible light photocatalytic activity of interlayer-isolated triplex Ag@SiO₂@TiO₂ core–shell nanoparticles

In situ fabrication of depth-type hierarchical CNT/quartz fiber filters for high efficiency filtration of sub-micron aerosols and high water repellency

Theoretical realization of robust broadband transparency in ultrathin seamless nanostructures by dual blackbodies for near infrared light

Correlation between charge-transfer and rotation of C₆₀ on WO₂/W(110)

Strongly luminescent monolayered MoS₂ prepared by effective ultrasound exfoliation

Biomimetic metal oxides for the extraction of nanoparticles from water

Photoluminescence and time-resolved carrier dynamics in thiol-capped CdTe nanocrystals under high pressure

Surface plasmon enhanced drug efficacy using core–shell Au@SiO₂ nanoparticle carrier

Phase transition, size control and color tuning of NaREF₄:Yb³⁺, Er³⁺ (RE = Y, Lu) nanocrystals

Single-cell resolution diagnosis of cancer cells by carbon nanotube electrical spectroscopy

Textile electrodes woven by carbon nanotube–graphene hybrid fibers for flexible electrochemical capacitors

Evolution of electroluminescence from silicon nitride light-emitting devices via nanostructural silver

Polarization properties of fluorescent BSA protected Au₂₅ nanoclusters

Self-cleaning antimicrobial surfaces by bio-enabled growth of SnO₂ coatings on glass

Nitrogen doped holey graphene as an efficient metal-free multifunctional electrochemical catalyst for hydrazine oxidation and oxygen reduction

In vitro cell imaging using multifunctional small sized KGdF₄:Yb³⁺,Er³⁺ upconverting nanoparticles synthesized by a one-pot solvothermal process

Inverted CdSe/CdS/ZnS quantum dot light emitting devices with titanium dioxide as an electron-injection contact

Enhanced photovoltaic performance of a dye-sensitized solar cell using graphene–TiO₂ photoanode prepared by a novel in situ simultaneous reduction-hydrolysis technique

Self-assembled, robust titanate nanoribbon membranes for highly efficient nanosolid capture and molecule discrimination

Microscopy and tunable resistive pulse sensing characterization of the swelling of pH-responsive, polymeric expansile nanoparticles

Synthesizing tubular and trapezoidal shaped ZnO nanowires by an aqueous solution method

Integration of CuInS₂-based nanocrystals for high efficiency and high colour rendering white light-emitting diodes

TiO₂ nanocrystals shell layer on highly conducting indium tin oxide nanowire for photovoltaic devices

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How do the electron beam writing and metal deposition affect the properties of graphene during device fabrication?

Content Provider	Royal Society of Chemistry (RSC)
Author	Wang, Haomin Shen, Xiaonan Yu, Ting
Copyright Year	2013
Abstract	Electron beam exposure and metallic contact formation are commonly used processes for fabrication of graphene-based devices. We report a detailed Raman study on the influence of medium energy electron irradiation and metal atoms on defectivity and doping on monolayer and bilayer graphene. It is found that the electron beam could induce disorder into graphene layers mainly by three ways: knocking-off carbon atoms, reaction with substrate and deposition of amorphous carbon. We observe that bilayer graphene exhibits higher stability under e-beam irradiation than monolayer graphene. Our study on the formation process of metallic contacts reveals that evaporation of Ti normally cannot induce any defects into graphene while deposition of Au can introduce a large amount of damage. This work could be valuable for further development of processes in the fabrication of graphene-based devices.
Starting Page	3352
Ending Page	3358
Page Count	7
File Format	HTM / HTML PDF
ISSN	20403364
Volume Number	5
Issue Number	8
Journal	Nanoscale
DOI	10.1039/c3nr33460k
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Open
Subject Keyword	Amorphous carbon Ti Graphene Dopant Raman Carbon
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology

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