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Inside back cover

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Nanoscale Vol - 5 Issue - 7

Nanoscale Vol - 5 Issue - 6

Nanoscale Vol - 5 Issue - 5

Nanoscale Vol - 5 Issue - 4

Nanoscale Vol - 5 Issue - 3

Formation of silicon nanoparticles by a pressure induced nucleation mechanism

Content Provider	Royal Society of Chemistry (RSC)
Author	Kim, Hyun Jae Kim, Si Joon Kang, Myung-Koo
Copyright Year	2013
Abstract	Formation of silicon nanoparticles (SiNPs) was achieved using excimer laser crystallization of an amorphous Si (a-Si) thin film using a SiO2 capping layer (C/L) with improved thin-film transistor (TFT) performance due to the enlarged grain size of polycrystalline Si (poly-Si). After laser irradiation of an a-Si thin film covered with C/L, fluctuation in the surface morphology of the C/L was observed above the critical laser energy density (Ecr) with the formation of SiNPs. The grain size of the poly-Si layer after crystallization increased abruptly at the same time. A non-uniform pressure distribution beneath the SiO2 C/L was proposed for the initiation of nucleation, which is named pressure induced nucleation (PIN) mechanism. Following nucleation, the release of latent heat made it difficult for the remnant liquid Si to solidify and the volume increased due to the density difference between the liquid and solid Si. Consequently, the pressure on the liquid Si caused SiNPs to sprout through the SiO2 C/L as grains grew from the low temperature to high temperature point. This study offers not only a simple method to fabricate SiNPs with controllable size/density but also larger grain size with lower laser energy density, which leads to higher TFT performance.
Starting Page	3266
Ending Page	3271
Page Count	6
File Format	HTM / HTML PDF
ISSN	20403364
Volume Number	5
Issue Number	8
Journal	Nanoscale
DOI	10.1039/c3nr34178j
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Open
Subject Keyword	Latent heat Solidify (Grip Inc. album) Nucleation Thin-film transistor Laser Crystallite Energy density Excimer laser
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology

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