NDLI: An efficient PE-ALD process for TiO<sub>2</sub> thin films employing a new Ti-precursor

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Inside back cover

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Journal of Materials Chemistry C Vol -3

Journal of Materials Chemistry C Vol -2

Journal of Materials Chemistry C Vol -1

An efficient PE-ALD process for TiO₂ thin films employing a new Ti-precursor

Content Provider	Royal Society of Chemistry (RSC)
Author	Mitschker, F. Wiesing, M. Torun, B. Grundmeier, G. Devi, A. Gebhard, M. Giner, I. Arcos, T. de los Awakowicz, P.
Copyright Year	2016
Abstract	An efficient plasma-enhanced atomic layer deposition (PE-ALD) process was developed for TiO2 thin films of high quality, using a new Ti-precursor, namely tris(dimethylamido)-(dimethylamino-2-propanolato)titanium(IV) (TDMADT). The five-coordinated titanium complex is volatile, thermally stable and reactive, making it a potential precursor for ALD and PE-ALD processes. Process optimization was performed with respect to plasma pulse length and reactive gas flow rate. Besides an ALD window, the application of the new compound was investigated using in situ quartz-crystal microbalance (QCM) to monitor surface saturation and growth per cycle (GPC). The new PE-ALD process is demonstrated to be an efficient procedure to deposit stoichiometric titanium dioxide thin films under optimized process conditions with deposition temperatures as low as 60 °C. Thin films deposited on Si(100) and polyethylene-terephthalate (PET) exhibit a low RMS roughness of about 0.22 nm. In addition, proof-of-principle studies on TiO2 thin films deposited on PET show promising results in terms of barrier performance with oxygen transmission rates (OTR) found to be as low as 0.12 cm3 × cm−2 × day−1 for 14 nm thin films.
Starting Page	1057
Ending Page	1065
Page Count	9
File Format	HTM / HTML PDF
ISSN	20507526
Volume Number	4
Issue Number	5
Journal	Journal of Materials Chemistry C
DOI	10.1039/c5tc03385c
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Subscribed
Subject Keyword	Atomic layer deposition Titanium Process optimization Blood plasma Microbalance Stoichiometry Titanium dioxide Polyethylene terephthalate Root mean square Oxygen
Content Type	Text
Resource Type	Article
Subject	Chemistry Materials Chemistry

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