NDLI: Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer

Content Provider	Royal Society of Chemistry (RSC)
Author	Tian, Zhong-Qun Wang, Wei Han, Lianhuan Tian, Zhao-Wu Zhan, Dongping Jia, Jing-Chun Zhang, Jie Zhang, Lin
Copyright Year	2017
Abstract	Although metal assisted chemical etching (MacEtch) has emerged as a versatile micro-nanofabrication method for semiconductors, the chemical mechanism remains ambiguous in terms of both thermodynamics and kinetics. Here we demonstrate an innovative phenomenon, i.e., the contact electrification between platinum (Pt) and an n-type gallium arsenide (100) wafer (n-GaAs) can induce interfacial redox reactions. Because of their different work functions, when the Pt electrode comes into contact with n-GaAs, electrons will move from n-GaAs to Pt and form a contact electric field at the Pt/n-GaAs junction until their electron Fermi levels (EF) become equal. In the presence of an electrolyte, the potential of the Pt/electrolyte interface will shift due to the contact electricity and induce the spontaneous reduction of MnO4− anions on the Pt surface. Because the equilibrium of contact electrification is disturbed, electrons will transfer from n-GaAs to Pt through the tunneling effect. Thus, the accumulated positive holes at the n-GaAs/electrolyte interface make n-GaAs dissolve anodically along the Pt/n-GaAs/electrolyte 3-phase interface. Based on this principle, we developed a direct electrochemical nanoimprint lithography method applicable to crystalline semiconductors.
Starting Page	2407
Ending Page	2412
Page Count	6
File Format	HTM / HTML PDF
ISSN	20416520
Volume Number	8
Issue Number	3
Journal	Chemical Science
DOI	10.1039/c6sc04091h
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Subscribed
Subject Keyword	Chemical milling Extrinsic semiconductor Electrode Electric field Electrolyte Anode Gallium arsenide Redox Electrochemistry Nanolithography Wafer Contact electrification
Content Type	Text
Resource Type	Article
Subject	Chemistry

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