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| Content Provider | IET Digital Library |
|---|---|
| Author | Nan, Xueli Zhang, Binzhen Yang, Xin Ge, Shaolei |
| Abstract | Radio-frequency (RF) attenuators show unique advantages and a great development potential in phased array radars. A kind of programmable step attenuators with high precision based on contact-type microelectromechanical system series switches is proposed herein. This work paid attention to the design and fabrication of switches – the key components of attenuators. By setting up vent holes on the pull-down plates of switches, the mass of plates was reduced, together with the decreased influence of air damping. Meanwhile, switches were manufactured and packaged through ultraviolet lithography (UV-LIGA) technology with the S parameter test being performed. Results showed that the insertion loss in a range of 0.3 and 1.8 dB under the condition that attenuation modules are short-circuited at the same time, which is basically the same with the simulation results of 0.1–1.3 dB. While all the return losses S11 were <15 dB expect from that at 10 dB. In addition, the designed attenuator showed gentle attenuation in a range of DC ∼20 GHz. However, on the whole, the deviation is controlled within 2 dB, which is basically consistent with the design results of 1 dB. It can be found from the obtained results that all indices of the attenuator satisfied the design requirements. |
| Starting Page | 702 |
| Ending Page | 706 |
| Page Count | 5 |
| Volume Number | 11 |
| e-ISSN | 17500443 |
| Issue Number | Issue 11, Nov (2016) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/11/11 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2016.0191 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2016-11-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Designed Attenuator MEMS And NEMS Device Technology Microelectromechanical System Series Switches Micromechanical Device Phased Array Radars Programmable Step Attenuators Radio Frequency Attenuators Radio Link And Equipment Radio Network RF Attenuators |
| Content Type | Text |
| Resource Type | Article |
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