NDLI: One to 40 GHz ultra-wideband RF MEMS direct-contact switch based on GaAs MMIC technique

Content Provider	IET Digital Library
Author	Chu, Chenlei Liao, Xiaoping
Abstract	This study presents a 1–40 GHz ultra-wideband radio frequency (RF) micro-electro-mechanical systems (MEMS) direct-contact switch based on a GaAs microwave monolithic integrated circuit (MMIC) process. The proposed switch utilises an inline cantilever membrane and a pull-in electrode to achieve ‘off’ and ‘on’ states. It has been manufactured by micro-machining, which is completely compatible with the GaAs MMIC process. An equivalent distributed parameter circuit model of the switch is established to analyse the microwave performances. The measured S-parameters show that the isolation (S 21) in the ‘off’ state is better than 22.5 dB from 1 to 40 GHz. In the ‘on’ state, the input reflection coefficient (S 11) is less than −20.9 dB and the forward transmission coefficient (S 21) is better than −0.25 dB over the complete band. In addition, the measured pull-in voltage is ∼17.5 V. The measured maximum power handling capacity is 36.5 dBm. A lifetime of 2.4 × 107 switching cycles is also verified by this design. The whole structure is designed with the purpose of expanding its working bandwidth and achieving higher microwave performances over current state of art.
Starting Page	879
Ending Page	884
Page Count	6
ISSN	17518725
Volume Number	12
e-ISSN	17518733
Issue Number	Issue 6, May (2018)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-map/12/6
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-map.2017.0481
Journal	IET Microwaves, Antennas & Propagation
Publisher Date	2017-12-04
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Equivalent Distributed Parameter Circuit Model Frequency 1 GHz to 40 GHz GaAs MEMS And NEMS Device Technology Microswitches Microwave IC Microwave Monolithic Integrated Circuit Process Microwave Switches MMIC MMIC Technique Relay And Switches Semiconductor Integrated Circuit Ultra-wideband Radio Frequency Micro-electro-mechanical System Direct-contact Switch Ultra-wideband RF MEMS Direct-contact Switch
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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