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| Content Provider | IET Digital Library |
|---|---|
| Author | Lu, Hongda Lv, Xin Zhou, Kai Liu, Yong Chao |
| Abstract | A terahertz (THz) waveguide-fed antipodal tapered slot antenna (ATSA) based on silicon micromachined technology is proposed. The ATSA is composed of an antipodal tapered slots structure and a WR2.2 feeding waveguide, monolithically fabricated by deep reactive-ion etching, and sputtering gold and gold–gold thermo-compression bonding. The input return loss is tested and shows a level below −15 dB within 480 to 500 GHz. The gaussicity of radiation patterns at the working band is calculated to be 90%. Through further experiment, at 492 GHz, the ATSA exhibits asymmetric beamwidths of 25.5° and 25° in the E- and H- planes, respectively, and sidelobes below −8 dB, along with a 14.6 dB gain, which agree well with the simulated results. The proposed THz waveguide-fed ATSA is suitable for use as a feeder of THz imaging and detection systems. |
| Starting Page | 615 |
| Ending Page | 617 |
| Page Count | 3 |
| ISSN | 00135194 |
| Volume Number | 50 |
| e-ISSN | 1350911X |
| Issue Number | Issue 8, Apr (2014) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/el/50/8 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/el.2014.0327 |
| Journal | Electronics Letters |
| Publisher Date | 2014-03-28 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Antenna Radiation Pattern Asymmetric Beamwidths Deep Reactive-ion Etching DRIE Gold-gold Thermo-compression Bonding Micromachined Terahertz Waveguide-fed Antipodal Tapered Slot Antenna Radiation Pattern Semiconductor Technology Single Antenna Slot Antenna Sputter Etching Sputtering Gold Bonding Surface Topography Measurement THz Waveguide-fed Antipodal Tapered Slot Antenna THz Waveguide-fed ATSA WR2.2 Feeding Waveguide |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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