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| Content Provider | IET Digital Library |
|---|---|
| Author | Oh, K. Yang, S. Lee, J. Park, K. Sung, M. Y. |
| Abstract | An n-type polycrystalline silicon thin-film transistor (poly-Si TFT) with a bottom-gate structure using excimer laser annealing (ELA) for active matrix organic light-emitting diode displays is proposed. A problem with bottom-gate poly-Si TFTs (BGPs) using ELA, namely, the disconnection of poly-Si at the boundary of the gate metal during the ELA crystallisation, was solved by developing a novel process to control the slope of the gate metal. We realised ELA BGPs with pure-Mo gate having a thickness of more than 150 nm. The BGPs have better breakdown voltage characteristics compared with the conventional top-gate poly-Si TFTs because of its flat channel region and homogeneous electric field distribution in the gate insulator. |
| Starting Page | 2030 |
| Ending Page | 2032 |
| Page Count | 3 |
| ISSN | 00135194 |
| Volume Number | 51 |
| e-ISSN | 1350911X |
| Issue Number | Issue 24, Nov (2015) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/el/51/24 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/el.2015.2422 |
| Journal | Electronics Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Active Matrix Organic Light-emitting Diode Display AMOLED Display Annealing Processes in Semiconductor Technology Bottom-gate Structure Breakdown Voltage Characteristic Crystallisation Display Technology ELA BGP Elemental Semiconductor Excimer Laser Annealing Crystallisation Excimer Lasers Field Effect Device Flat Channel Region Gate Insulator Homogeneous Electric Field Distribution Laser Beam Annealing LED Displays Light Emitting Diode Mo Molybdenum N-type Polycrystalline Silicon Thin-film Transistor Organic Light Emitting Diode Polysilicon TFT Silicon Thin Film Transistors |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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