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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Bo Wang Law, M.K. Bermak, A. |
| Copyright Year | 2012 |
| Description | Author affiliation: ECE Department, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong SAR (Bo Wang; Bermak, A.) || The State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macao, China (Law, M.K.) |
| Abstract | In this paper, a low-cost capacitive relative humidity hygrometer suitable for food moisture monitoring is presented. The variation of dielectric constant of polyimide film to relative humidity enables the sensor's functionality. A fully differential capacitance to digital converter is utilized as the hygrometer digital readout, which is immune to circuit wiring parasitic and enable the sensor's long-term stability. The humidity sensor is implemented using TSMC1P6M 0.18µm technology with thick top metal option. Simulation results indicate that an inaccuracy of +6/−5%RH can be achieved sensing from 10%RH ∼ 90%RH, with 5.4µW power consumption for sensing and 21.6mW power consumption for sensor heating. |
| Starting Page | 95 |
| Ending Page | 99 |
| File Size | 966525 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781467326872 |
| e-ISBN | 9781467326889 |
| DOI | 10.1109/ACQED.2012.6320483 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-07-10 |
| Publisher Place | Malaysia |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Heating CMOS integrated circuits Monitoring Substrates MOS devices |
| Content Type | Text |
| Resource Type | Article |
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