NDLI: A micromechanical biosensor with interdigitated capacitor readout

Content Provider	IEEE Xplore Digital Library
Author	Yang Choon Lim Kouzani, A. Kaynak, A. Al-Ameri, R. Wei Duan
Copyright Year	2011
Description	Author affiliation: School of Engineering, Deakin University, Pigdons Rd, Waurn Ponds, 3217, VIC, Australia (Yang Choon Lim; Kouzani, A.; Kaynak, A.; Al-Ameri, R.) \|\| School of Medicine, Deakin University, Pigdons Rd, Waurn Ponds, 3217, VIC, Australia (Wei Duan)
Abstract	The growing demands of high-throughput, accurate and fast response biological or chemical sensors are driving the development of new detection technologies. This paper presents a micromechanical biosensor with capacitive read-out method. The proposed biosensor design consists of a fixed-fixed beam attached to an interdigitated capacitor. Implementation of the interdigitated capacitor design improves the sensitivity of the biosensor. The effects of the electrode thickness, length and the number of electrode fingers on the change of capacitance are investigated. The results show that the percentage change of capacitance is proportional to the number of the electrode fingers. Similarly, the increase in the length of the electrodes results in an increase in the percentage change of the capacitance. However, as the thickness of the electrode increases, the percentage change of the capacitance decreases.
Starting Page	42
Ending Page	46
File Size	1430841
Page Count	5
File Format	PDF
ISBN	9781424493234
e-ISBN	9781424493241
DOI	10.1109/ICCME.2011.5876702
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-05-22
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Integrated circuits Electrodes beam Biosensor interdigitated capacitor Position measurement Capacitance surface stress capacitive Biosensors Thickness measurement Manganese
Content Type	Text
Resource Type	Article

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