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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Habibullah Pota, H.R. Petersen, I.R. |
| Copyright Year | 2013 |
| Description | Author affiliation: SEIT, Univ. of New South Walse, Canberra, ACT, Australia (Habibullah; Pota, H.R.; Petersen, I.R.) |
| Abstract | In this paper, we present a spiral scanning method using an atomic force microscope (AFM). A spiral motion is generated by applying slowly varying amplitude sine wave in the X-axis and cosine wave in the Y-axis of the piezoelectric tube (PZT) scanner of the AFM. An LQG controller also designed for damping the resonant mode of the PZT scanner for the lateral positioning of the AFM scanner stage. In this control design, an internal model of the reference sinusoidal signal is introduced with the plant model and an integrator with the system error is introduced. A vibration compensator is also designed and included in the feedback loop with the plant to suppress the vibration of the PZT at the resonant frequency. Experimental results demonstrate the effectiveness of the proposed scheme. |
| Starting Page | 1 |
| Ending Page | 6 |
| File Size | 1641260 |
| Page Count | 6 |
| File Format | |
| ISBN | 9781467357678 |
| e-ISBN | 9781467357692 |
| DOI | 10.1109/ASCC.2013.6606378 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-06-23 |
| Publisher Place | Turkey |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Damping Vibrations Spirals Microscopy Resonant frequency Sensors Mathematical model |
| Content Type | Text |
| Resource Type | Article |
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