NDLI: Simulations of surface and bulk acoustic wave MEMS biosensors

Content Provider	IEEE Xplore Digital Library
Author	Jamil, N. Nordin, A.N. Voiculescu, I. Mel, M.
Copyright Year	2010
Description	Author affiliation: Department of Mechanical Engineering, The City College of New York, USA (Voiculescu, I.) \|\| Department of Electrical and Computer Engineering, International Islamic University Malaysia (Jamil, N.; Nordin, A.N.) \|\| Department of Biotechnology Engineering, International Islamic University Malaysia (Mel, M.)
Abstract	Traditionally a telecommunication device, the emerging application of acoustic wave devices as sensors is rapidly gaining attention due to its high sensitivities. In this work, a comparative study of surface (SAW) and bulk (BAW) acoustic wave biosensors is presented. The MEMS SAW resonator is formed using a lithium niobate substrate with Al electrodes while the BAW resonator is formed using quartz substrate with gold electrodes. Finite element simulations of a 290 MHz SAW and a 220 MHz BAW resonator were performed using COMSOL $Multiphysics^{™}.$ Both models were simulated to determine their resonance frequency and frequency shift due to the loading of DF-1 animal cells, a biological material. The structure of the SAW device allows an additional transient simulation, which provides information regarding the acoustic wave propagation delay due to the presence of the cells. From the simulations it was observed that the SAW device yielded 2.8 MHz frequency shift (Δf) due to the cells while the BAW device provided Δf of 2.7 MHz. The propagation delay in the SAW resonator due to the cells was simulated to be 3.5 ns.
Starting Page	129
Ending Page	133
File Size	1224981
Page Count	5
File Format	PDF
ISBN	9781424466368
e-ISBN	9782355000119
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-05-05
Publisher Place	Spain
Access Restriction	Subscribed
Rights Holder	EDA Publishing
Subject Keyword	biosensor Biological system modeling Acoustic wave Surface acoustic wave devices animal-cell bulk acoustic wave surface acoustic wave Micromechanical devices Electrodes Surface acoustic waves Resonant frequency resonator Acoustic sensors DF-1 Biosensors COMSOL Acoustic waves Propagation delay
Content Type	Text
Resource Type	Article

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