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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yang, H. Tsai, T.-H. Hu, C.-C. |
| Copyright Year | 2008 |
| Description | Author affiliation: Inst. of Precision Eng., Nat. Chung Hsing Univ., Taichung (Yang, H.; Hu, C.-C.) || Dept. of Mech. Eng., WuFeng Inst. of Technol. (Tsai, T.-H.) |
| Abstract | This paper is to describe a design and fabrication method for a valve-less peristaltic micro-pump. The valve-less peristaltic micro-pump with three membrane chambers in a serial is actuated by three piezoelectric (PZT) actuators. With the fluidic flow design, liquid in the flow channel is pumped to a constant flow speed ranged from 0.4 to 0.48 mm/s. In term of the maximum flow rate of the micro-pump is about 365 mul/min, when the applied voltage is 24 V and frequency 50 Hz. Photolithography process was used to fabricate the micro-pump mold. PDMS molding and PDMS bonding method were used to fabricate the micro-channel and actuator chambers. A portable drive controller was designed to control three PZT actuators in a proper sequence to drive the chamber membrane. Then, all parts were integrated into the portable valve-less peristaltic micro-pump system. |
| Starting Page | 273 |
| Ending Page | 278 |
| File Size | 5112451 |
| Page Count | 6 |
| File Format | |
| ISBN | 9782355000065 |
| DOI | 10.1109/DTIP.2008.4752999 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-04-09 |
| Publisher Place | France |
| Access Restriction | Subscribed |
| Rights Holder | TIMA |
| Subject Keyword | Fabrication Design methodology Pumps Lithography Piezoelectric actuators Fluid flow Voltage Micropumps Frequency Biomembranes |
| Content Type | Text |
| Resource Type | Article |
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