NDLI: Using Data Mining Techniques in Development of MURA Geometric Prediction Module for Large Area Photomask

Content Provider	IEEE Xplore Digital Library
Author	Wen-Hsing Kao Hung, J.C. Hsu, V.
Copyright Year	2008
Description	Author affiliation: Dept. of Inf. Technol., Overseas Chinese Inst. of Technol., Taiwan (Wen-Hsing Kao; Hung, J.C.; Hsu, V.)
Abstract	Data Mining is concerned with the different applications for discovery of a priori unknown relationships such as associations, groupings, and classifiers from data. The solution of MURA problems in producing to the large photomask industry is finding the association rules or the algorithms for learning classifiers from relational data. In this paper, we designed and developed a MURA related association rules which are suitable for the MURA model requirements, and we named MURA Risk rating system. Our purpose is to figure out the effective application of data mining algorithms in monitoring and control of complex Large Area Photomask systems. We combine the Data Mining into MURA risk management. It is indeed saving time from standby machine, and expectation of the photomask processing graphic of MURA problems. By our scheme and MURA risk rating system, we can shorten the time and reduce the MURA problems.
Starting Page	957
Ending Page	962
File Size	359332
Page Count	6
File Format	PDF
ISBN	9780769534732
DOI	10.1109/APSCC.2008.76
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-12-09
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Industrial relations Large Photomask Control systems Data processing Data Mining Data Mining application Data mining Association rules Synthetic aperture sonar Information technology Graphics Databases MURA Monitoring
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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