NDLI: Very High Q, NEMS Inductor for 12GHz Wireless Sensor Applications

Content Provider	IEEE Xplore Digital Library
Author	Khalid, N. Singh, J. Le, H.P. Shah, K. Devlin, J. Sauli, Z.
Copyright Year	2010
Abstract	This paper presents the design and optimisation of high quality (Q) factor inductors using Micro/Nano Electro-Mechanical Systems (NEMS/MEMS) technology for 10GHz to 20GHz frequency band. Three inductors have been designed with rectangular, circular and symmetric topologies. Comparison has been made amongst the three to determine the best Q-factor. Inductors are designed on Silicon-on-Sapphire (SOS) because of its advantages including high resistivity and low parasitic capacitance. The effects of various parameters such as outer diameter (OD), the width of metal traces (W), the thickness of the metal (T) and the air gap (AG) on the Q-factor and inductance performances are thoroughly investigated. Results indicate that the symmetric inductor has highest Q-factor with peak Q of 192 at 12GHz for a 1.13nH.
Starting Page	319
Ending Page	324
File Size	443110
Page Count	6
File Format	PDF
ISBN	9780769539782
e-ISBN	9781424460267
DOI	10.1109/DELTA.2010.45
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-13
Publisher Place	Vietnam
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Q factor Conductivity High Q inductor Topology Silicon-on-sapphire Inductors Design optimization Micromechanical devices Wireless sensor networks Nanoelectromechanical systems Micro/Nano Electro-Mechanical Systems (MEMS/NEMS) Frequency Parasitic capacitance
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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