NDLI: ASIC front-end for sensing MEMS-mirror position

Content Provider	IEEE Xplore Digital Library
Author	Chemmanda, Leo John Jianrong, Colin Chue Singh, Ravinder Pal Roterman, Yalon
Copyright Year	2014
Description	Author affiliation: Institute of Microelectronics A∗STAR (Agency for Science, Technology and Research) Singapore 117685 (Chemmanda, Leo John; Jianrong, Colin Chue; Singh, Ravinder Pal) \|\| Maradin Ltd. Israel 20692 (Roterman, Yalon)
Abstract	Capacitive sensing circuit for MEMS mirror based pico-projector scanning system is realized in this work. Two dimensional (2D) movements of the MEMS-mirror produce capacitive variations ΔCx and ΔCy. These are sensed and used to monitor and control the mirror movements in a closed feedback loop. The 2D mirror movement is produced using dual-actuation mechanism. High-voltage electro-static actuation is used for the horizontal movement (X-axis) and electro-magnetic actuation is used for the vertical movement (Y-axis). The high-voltage noise from the XSENSE couples into the YSENSE via the proof-mass (PM) and through other parasitic elements present in the MEMS device. The high-voltage noise is found to be the limiting factor for YSENSE resolution. Multi-pronged approach is used to suppress the high-voltage noise. High resolution temporal and position sensing for XSENSE and YSENSE respectively are successfully demonstrated.
Starting Page	396
Ending Page	399
File Size	566103
Page Count	4
File Format	PDF
ISBN	9781479948338
DOI	10.1109/ISICIR.2014.7029484
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-12-10
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Actuators pico-projector 2D position sensing Noise Capacitance Sensors Mirrors Capacitive sensing MEMS-mirror Clocks
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Vertical comb-drive MEMS mirror with sensing function for phase-shift device

A low-noise parasitic-insensitive switched-capacitor CMOS interface circuit for MEMS capacitive sensors

Position sensing and electrostatic actuation circuits for 2-D scanning MEMS micromirror

A high-sensitivity reconfigurable integrating dual-slope CDC for MEMS capacitive sensors

An energy-efficient capacitance-controlled oscillator-based sensor interface for MEMS sensors

A single-ended CMOS sensing circuit for MEMS gyroscope with noise cancellation

Capacitive feedback controlled PZT micro mirror arrays for wavelength selective switch

A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor

Integrated position sensing for control of XY actuator

ASIC front-end for sensing MEMS-mirror position

Similar Documents

Vertical comb-drive MEMS mirror with sensing function for phase-shift device

A low-noise parasitic-insensitive switched-capacitor CMOS interface circuit for MEMS capacitive sensors

Position sensing and electrostatic actuation circuits for 2-D scanning MEMS micromirror

A high-sensitivity reconfigurable integrating dual-slope CDC for MEMS capacitive sensors

An energy-efficient capacitance-controlled oscillator-based sensor interface for MEMS sensors

A single-ended CMOS sensing circuit for MEMS gyroscope with noise cancellation

Capacitive feedback controlled PZT micro mirror arrays for wavelength selective switch

A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor

Integrated position sensing for control of XY actuator

ASIC front-end for sensing MEMS-mirror position