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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yen-Hung Lin Ping-Feng Yang Sheng-Rui Jian Yi-Shao Lai Tei-Chen Chen |
| Copyright Year | 2008 |
| Description | Author affiliation: Central Labs., Adv. Semicond. Eng., Inc., Kaohsiung (Ping-Feng Yang; Yi-Shao Lai) || Dept. of Mater. Sci. & Eng., I-Shou Univ., Kaohsiung (Sheng-Rui Jian) || Dept. of Mech. Eng., Nat. Cheng Kung Univ., Tainan (Yen-Hung Lin; Tei-Chen Chen) |
| Abstract | This work presents experimental and molecular dynamics approaches towards deformation and phase transformation mechanisms of monocrystalline Si(100) subjected to nanoindentation. The nanoindentation experiment was conducted with a Berkovich indenter. Following the analysis using cross-sectional transmission electron microscopy with the samples prepared by focused ion beam milling, upon pressure release, metastable Si-III and Si-XII phases were identified inside the indentation-induced deformed region beneath the indent. We also demonstrated phase distributions during loading and unloading stages of spherical and Berkovich nanoindentations through molecular dynamics simulations. By searching the presence of the fifth neighboring atom within a non-bonding length, Si-III and Si-XII have been successfully distinguished from Si-I. Crystallinity of this mixed-phase was further identified by radial distribution functions. |
| Starting Page | 44 |
| Ending Page | 48 |
| File Size | 5133876 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424436231 |
| DOI | 10.1109/IMPACT.2008.4783804 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-10-22 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Phase change materials Geometry Electrodes Contacts Crystallization Crystalline materials Silicon Amorphous materials Phase change memory Tellurium |
| Content Type | Text |
| Resource Type | Article |
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