NDLI: P1–15: Patterning of high density magnetic nanodot arrays by imprint lithography with hole tone template

Content Provider	IEEE Xplore Digital Library
Author	Yuan Xu Wei Hu Xiaomin Yang Zhaohui Fan Hwu, J. Wago, K. Kuo, D.
Copyright Year	2010
Description	Author affiliation: Department of Recording Media Operations, Seagate Technology, 47010 Kato Road, Fremont, CA 94538 (Yuan Xu; Wei Hu; Xiaomin Yang; Zhaohui Fan; Hwu, J.; Wago, K.; Kuo, D.)
Abstract	Nanoimprint Lithography presents unique opportunities for high density patterning due to its advantages of sub-10nm resolution capability and high throughput. Imprint and pattern transfer with Pillar tone template were widely studies recently. However, there are several critical issues that still remain very challenging, including fabrication of pillar templates and pattern reverse from imprint holes to nano dots array at high density. In this Paper, we will demostrated the feasibility of imprint with hole tone template and its application in high-density nanodot array patterning. The authors have successfully demonstrated hole-tone template fabrication process and pattern transfer results with imprint pillar. The profile of imprint resist pillar was analyzed with cross-section scanning electron microscope(SEM). Pattern was transferred to underneath Co alloy thin films by ion beam milling into aligned dots with pitch of 50nm. Magnetic dots array were investigated with SEM and M-H loop measurement. Strong perpendicular anisotropy was induced by the patterning process. Magnetic measurement reveals through ion milling process, magnetization reversal was changed from domain wall pinning dominated to Stoner-Wohlfarth coherent rotation dominated. Coercivity and Remanence change during Ion beam etching were discussed. Extendibility to ultra-high density patterning is also investigated.
Starting Page	58
Ending Page	59
File Size	483834
Page Count	2
File Format	PDF
ISBN	9781424478897
e-ISBN	9781424478880
DOI	10.1109/IVNC.2010.5563182
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-07-26
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Scanning electron microscopy Media Perpendicular magnetic recording Magnetic domains Magnetic domain walls Lithography Hole-tone template Pattern Media Nanoimprint
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Carbon doped FePt perpendicular thin-film for ultra-high density magnetic recording media

Material properties and domain structure influence on pole erasure occurrence in perpendicular recording heads

Fabrication of ultra high density ferromagnetic column arrays by porous alumina template for magnetic recording media

Observation of magnetic interaction between the soft magnetic and the recording layers in double-layer perpendicular media

Patterning of granular magnetic media with a focused ion beam to produce single-domain islands at >140 Gbit/in/sup 2/

Challenges of patterned media

An Investigation Of Domains And Walls In Two NdFeB Alloys By Transmission Electron Microscopy

Development of high resolution and low noise single-layered perpendicular recording media for high density recording

Three-Dimensional Patterning using Ultraviolet Nanoimprint Lithography

P1–15: Patterning of high density magnetic nanodot arrays by imprint lithography with hole tone template

Similar Documents

Carbon doped FePt perpendicular thin-film for ultra-high density magnetic recording media

Material properties and domain structure influence on pole erasure occurrence in perpendicular recording heads

Fabrication of ultra high density ferromagnetic column arrays by porous alumina template for magnetic recording media

Observation of magnetic interaction between the soft magnetic and the recording layers in double-layer perpendicular media

Patterning of granular magnetic media with a focused ion beam to produce single-domain islands at >140 Gbit/in/sup 2/

Challenges of patterned media

An Investigation Of Domains And Walls In Two NdFeB Alloys By Transmission Electron Microscopy

Development of high resolution and low noise single-layered perpendicular recording media for high density recording

Three-Dimensional Patterning using Ultraviolet Nanoimprint Lithography

P1–15: Patterning of high density magnetic nanodot arrays by imprint lithography with hole tone template