NDLI: P1–6: Compensation of divergence of space charge dominated ion beams using electron injection and confinement in non-uniform magnetic fields

Content Provider	IEEE Xplore Digital Library
Author	Nicolaescu, D. Sakai, S. Gotoh, Y. Ishikawa, J.
Copyright Year	2010
Description	Author affiliation: Dept. of Electronics & Information Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai, Aichi 487-8501, Japan (Ishikawa, J.) \|\| Nissin Ion Equipment Co., Ltd., 575 Kuze Tonoshiro-cho, Minami-ku, Kyoto 601-8205, Japan (Sakai, S.) \|\| Dept. of Electronic Science and Engineering, Kyoto University, Nishikyo-ku, Kyoto 615-8510, Japan (Nicolaescu, D.; Gotoh, Y.)
Abstract	Advanced ion implantation systems require transportation to wafer of space charge dominated ion beams. Compensation of ion beam divergence may be obtained through electron injection and confinement in regions of nonuniform magnetic fields. Electron sources of choice are field emitter arrays with special properties. Modeling results are presented as proof of concept, together with design aspects for practical optimization.
Starting Page	40
Ending Page	41
File Size	511027
Page Count	2
File Format	PDF
ISBN	9781424478897
e-ISBN	9781424478880
DOI	10.1109/IVNC.2010.5563163
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-07-26
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ion beams Magnetic confinement Magnetic fields Space charge Ion implantation Clouds Trajectory ion implantation system electron confinement magnetic mirror space charge effects ion beam neutralization non-uniform magnetic field
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

ECR plasma source for heavy ion beam charge neutralization

Emittance measurement of space charge dominated electron beam confined by a longitudinal magnetic field

Production of extremely low energy electron beam with silicon-based field emitter arrays and its application to space charge neutralization of low-energy and high-current ion beam

Emittance measurement of space charge dominated electron beam confined by a longitudinal magnetic field

Intense electron beam propagation across a magnetic field

Formation of low energy electron beam with silicon field emitter arrays for space charge compensation in low-energy ion-implantation system

Analysis of a high brightness photo electron beam with self field and wake field effects

BEAM–BEAM EFFECTS IN SPACE CHARGE DOMINATED ION BEAMS ∗

Meter-long plasma source for heavy ion beam space charge neutralization

P1–6: Compensation of divergence of space charge dominated ion beams using electron injection and confinement in non-uniform magnetic fields

Similar Documents

ECR plasma source for heavy ion beam charge neutralization

Emittance measurement of space charge dominated electron beam confined by a longitudinal magnetic field

Production of extremely low energy electron beam with silicon-based field emitter arrays and its application to space charge neutralization of low-energy and high-current ion beam

Emittance measurement of space charge dominated electron beam confined by a longitudinal magnetic field

Intense electron beam propagation across a magnetic field

Formation of low energy electron beam with silicon field emitter arrays for space charge compensation in low-energy ion-implantation system

Analysis of a high brightness photo electron beam with self field and wake field effects

BEAM–BEAM EFFECTS IN SPACE CHARGE DOMINATED ION BEAMS ∗

Meter-long plasma source for heavy ion beam space charge neutralization

P1–6: Compensation of divergence of space charge dominated ion beams using electron injection and confinement in non-uniform magnetic fields