NDLI: Large Stroke Actuators for Adaptive Optics

Content Provider	IEEE Xplore Digital Library
Author	Fernandez, B. Kubby, J.A.
Copyright Year	2007
Description	Author affiliation: Univ. of California at Santa Cruz, Santa Cruz (Fernandez, B.; Kubby, J.A.)
Abstract	In this paper we review the use of a 3- dimensional MEMS fabrication process to prototype long stroke (>10 mum) actuators as are required for use in future adaptive optics systems in astronomy and vision science. The electrochemical fabrication (EFABtrade) process that was used creates metal micro- structures by electroplating multiple, independently patterned layers. The process has the design freedom of rapid prototyping where multiple patterned layers are stacked to build structures with virtually any desired geometry, but in contrast has much greater precision, the capability for batch fabrication and provides parts in engineering materials such as nickel. The design freedom enabled by this process has been used to make both parallel plate and comb drive actuator deformable mirror designs that can have large vertical heights of up to 1 mm. As the thickness of the sacrificial layers used to release the actuator is specified by the designer, rather than by constraints of the fabrication process, the design of large- stroke actuators is straightforward and does not require any new process development. Since the number of material layers in the EFABtrade process is also specified by the designer it has been possible to gang multiple parallel plate actuators together to decrease the voltage required for long-stroke actuators.
Starting Page	131
Ending Page	136
File Size	1192492
Page Count	6
File Format	PDF
ISBN	1424402670
ISSN	07496877
DOI	10.1109/UGIM.2006.4286367
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-06-25
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Actuators Adaptive optics Optical device fabrication Process design Micromechanical devices Prototypes Astronomy Virtual prototyping Geometrical optics Design engineering EFAB Adaptive Optics long-stroke electro-deposition
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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