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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yiliu Wang Hashimoto, K.-y. Omori, T. Yamaguchi, M. |
| Copyright Year | 2008 |
| Description | Author affiliation: Grad. Sch. of Eng., Chiba Univ., Chiba (Yiliu Wang; Hashimoto, K.-y.; Omori, T.; Yamaguchi, M.) |
| Abstract | This paper describes full-wave analysis of the $SiO_{2}$ overlay with finite thickness/metal grating/rotated YX-LN substrate structure. The influence of thickness and surface topology of the $SiO_{2}$ overlay, metal grating selection (copper or aluminum) upon excitation and propagation characteristics of acoustic guided modes are discussed in detail. It is shown that in the structure there propagate several types of acoustic guided modes. One type of mode concentrates the energy near the metal grating, and becomes the piezoelectric boundary acoustic waves with relatively large electromechanical coupling when $SiO_{2}$ thickness becomes semi-infinite. Another mode concentrates its energy near the top surface of the $SiO_{2}$ overlay and becomes the Rayleigh-type SAW on $SiO_{2}$ when thickness is semi-infinite. With an increase in $SiO_{2}$ thickness, it rapidly loses its piezoelectric coupling. The remaining mode is a series of guided modes bounded in the $SiO_{2}$ layer, in which the $SiO_{2}$ layer behaves as a waveguide because of its low acoustic wave velocities. |
| Starting Page | 1211 |
| Ending Page | 1214 |
| File Size | 1070980 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424424283 |
| DOI | 10.1109/ULTSYM.2008.0292 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-11-02 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Surface acoustic waves Acoustic waves Acoustic propagation Gratings Surface acoustic wave devices Substrates Topology Packaging Filters Electrodes SH-type PBAW modes non-leaky |
| Content Type | Text |
| Resource Type | Article |
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