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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Sato, H. Onishi, K. Shimamura, T. Tomita, Y. |
| Copyright Year | 1998 |
| Description | Author affiliation: Dev. Res. Lab., Matsushita Electr. Ind. Co. Ltd., Kadoma, Japan (Sato, H.) |
| Abstract | We have developed temperature stable SAW devices by using a direct-bonding technique. Temperature stability approximating that of quartz was achieved by thinning a 36/spl deg/ Y-X LiTaO/sub 3/ substrate to 30 /spl mu/m on a glass substrate. The temperature compensated SAW devices were fabricated using a stacking procedure based on the direct bonding of a piezoelectric single crystalline layer onto a glass substrate. Because the thermal expansion coefficient (TEC) of the glass substrate is smaller than that of the piezoelectric layer, the piezoelectric layer experiences thermal stress. As a result, the temperature dependence of the SAW devices could be improved. By using a glass substrate with small TEC and minimizing the LiTaO/sub 3//glass thickness ratio, the temperature coefficient of frequency (TCF) of the SAW devices was maintained at approximately -6 ppm//spl deg/C from -30/spl deg/C to 80/spl deg/C. The SAW propagation characteristics (velocity and electromechanical coupling factor) and the frequency response of the SAW devices were almost the same as those of SAW devices using a 36/spl deg/ Y-X LiTaO/sub 3/ substrate. |
| Starting Page | 335 |
| Ending Page | 338 |
| File Size | 245928 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780340957 |
| ISSN | 10510117 |
| DOI | 10.1109/ULTSYM.1998.762159 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1998-10-05 |
| Publisher Place | Japan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Temperature Surface acoustic wave devices Bonding Glass Thermal stresses Thermal expansion Stability Stacking Piezoelectric devices Crystallization |
| Content Type | Text |
| Resource Type | Article |
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