NDLI: Single element and linear array PZT ultrasound biomicroscopy transducers

Content Provider	IEEE Xplore Digital Library
Author	Lukacs, M. Sayer, M. Foster, S.
Copyright Year	1997
Description	Author affiliation: Dept. of Phys., Queen's Univ., Kingston, Ont., Canada (Lukacs, M.)
Abstract	PZT coatings have been produced in the thickness range of 5-200 microns using a composite sol gel process (M. Lukacs et al., 1996). The application of this process in the fabrication of high frequency transducers suitable for ultrasound biomicroscopy (UBM) has been investigated. Curved single element transducers have been produced in a range of 70-165 MHz with -6dB bandwidths as high as 52% and minimum insertion losses ranging from -47 to -58 dB. Laser micromachining techniques for patterning linear array structures to operate at similar frequencies have been developed. Trenches <10 /spl mu/m wide with a 50% taper through 20 /spl mu/m of ceramic have been achieved with a pulsed frequency doubled Nd:YAG laser. Trenches 5 /spl mu/m wide with straight walls have been achieved using a pulsed KrF excimer laser.
Starting Page	1709
Ending Page	1712
File Size	256793
Page Count	4
File Format	PDF
ISBN	0780341538
ISSN	10510117
DOI	10.1109/ULTSYM.1997.663340
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-10-05
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ultrasonic imaging Frequency Ultrasonic transducers Optical pulses Ultrasonic transducer arrays Coatings Optical device fabrication Bandwidth Insertion loss Micromachining
Content Type	Text
Resource Type	Article

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