NDLI: Influence of metallization on temperature stability of SAW devices

Content Provider	IEEE Xplore Digital Library
Author	Henry, E. Ballandras, S. Bigler, E. Marianneau, G. Martin, G. Camou, S.
Copyright Year	1997
Description	Author affiliation: LPMO, Univ. de Franche-Comte, Besancon, France (Henry, E.)
Abstract	Most Surface Acoustic Wave (SAW) devices exhibit a very small sensitivity to thermal effects. However, even on instrinsically compensated crystal cuts, the deposition of metal strips at the surface (transducers or reflectors) induces important changes in the thermoelastic properties of the device. A theoretical approach based on the Sinha-Tiersten perturbation method is proposed to model the influence of metallization on SAW properties on (ST,X) quartz, namely the temperature stability of the phase velocity of Rayleigh waves. Since this perturbation method only gives access to the first order Temperature Coefficient of Frequency (TCF), it is combined with a conventional calculation of the second order TCF to predict the evolution of the turnover temperature. The proposed calculation also requires temperature derivatives of the elastic constants of the metal which can be calculated for different materials. More classical approaches are also considered based on the calculation of surface permittivity using thermally varied elastic constants. Finally, theoretical results are compared to experimental data measured on SAW devices on (ST,X) quartz using Aluminium, Gold or Chromium gratings.
Starting Page	221
Ending Page	225
File Size	343879
Page Count	5
File Format	PDF
ISBN	0780341538
ISSN	10510117
DOI	10.1109/ULTSYM.1997.663014
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-10-05
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Metallization Stability Surface acoustic wave devices Surface acoustic waves Perturbation methods Temperature sensors Acoustic waves Strips Acoustic transducers Thermoelasticity
Content Type	Text
Resource Type	Article

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