NDLI: Investigation of accelerated aging characteristics of a SAW filter

Content Provider	IEEE Xplore Digital Library
Author	Woodberry, M.E. Hunt, W.D.
Copyright Year	1997
Description	Author affiliation: Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA (Woodberry, M.E.)
Abstract	The aging characteristics of a longitudinally coupled SAW resonator on 64/spl deg/ LiNbO/sub 3/ are examined. The aging of these devices was accelerated by applying a high RF power until catastrophic failure occurred. The insertion was measured while the devices were being aged. A LabView program was used to automate equipment control and data acquisition during the experiment. After the devices had been tested, damage to the electrode metalization was observed using both optical and scanning electron microscopy. The observed damage included acoustically-induced metal migration and substrate damage. A device that had not been aged was laser probed to record the distribution of acoustic power across the device. The relation between the distribution of acoustic power and damage to the electrode metalization is discussed.
Starting Page	55
Ending Page	60
File Size	287266
Page Count	6
File Format	PDF
ISBN	0780341538
ISSN	10510117
DOI	10.1109/ULTSYM.1997.662979
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-10-05
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerated aging SAW filters Optical resonators Electrodes Optical microscopy Acoustic devices Surface acoustic waves Radio frequency Acoustic measurements Automatic control
Content Type	Text
Resource Type	Article

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