NDLI: ZnO on diamond: SAWs and pseudo-SAWs

Content Provider	IEEE Xplore Digital Library
Author	Adler, E.L. Solie, L.
Copyright Year	1995
Description	Author affiliation: Dept. of Electr. Eng., McGill Univ., Montreal, Que., Canada (Adler, E.L.)
Abstract	The development of low-loss UHF SAW filters has led to devices using the higher phase velocities of pseudo-surface-acoustic-waves and shear-horizontally polarized waves. Another way of obtaining higher velocities is to use higher-velocity materials. Diamond, for example, has a SAW velocity near 11 km/s and a longitudinal velocity close to 18 km/s. In this paper the dispersion characteristics and the SAW coupling constants of the ZnO on diamond structure are described for the two lowest order modes and for the high-velocity pseudo-SAW mode. The SAW coupling constants are given for the four possible transducer geometries. At constant thickness-frequency, for the two lowest order modes, an unexpectedly large coupling (2/spl Delta/v/v) is found over a certain range of layer thickness-frequency product; 23% for the first mode and 15% for the second. Because of dispersion, calculating coupling at constant thickness-wavenumber (as is done frequently) produces results which are nearly four times smaller than those calculated at constant thickness-frequency.
Starting Page	341
Ending Page	344
File Size	195424
Page Count	4
File Format	PDF
ISBN	0780329406
ISSN	10510117
DOI	10.1109/ULTSYM.1995.495594
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-11-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Zinc oxide Sawing machines Surface acoustic waves Silicon Polarization Frequency Piezoelectric films Substrates Transducers Geometry
Content Type	Text
Resource Type	Article

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