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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ortega, P. Vetter, M. Torres, I. Bermejo, S. Alcubilla, R. |
| Copyright Year | 2005 |
| Description | Author affiliation: Departament d'Enginyeria Electronica, Univ. Politecnica de Catalunya (Ortega, P.; Vetter, M.) |
| Abstract | In this work we present a study of phosphorus doped emitters using solid diffusion sources. This doping technique has a special interest in high efficiency solar cell fabrication because it can reach good uniformity and repeatability between samples, allowing uniform low doping emitter profiles (sheet resistance $R_{sh/100Omega}sq).$ Pre-deposition in the temperature range from 815degC to 900degC yields emitter sheet resistance from 30 to 900 Omega/sq with a in-wafer deviation of about 6% on 4" wafers. We determine the reverse saturation current density, $J_{oe},$ of our emitters by measuring the injection level dependence of effective lifetime using the quasi steady-state photoconductance (QSS-PC) method. $J_{oe}$ in phosphorus glass passivated emitters after the pre-deposition step is in the range of 160 to 400 fA/cm2. From data fitting of dependence of Joe with sheet resistance using PC-ID, the empiric fundamental surface recombination velocity is determined to be $S_{o}=$ 175 cm/s for the phosphorus glass passivated emitter surface |
| Sponsorship | Ministerio de Educacion y Ciencia Generalitat de Catalunya Diputacio de Tarragona Red IberNAM LEAR Corp. "La Caixa" Universitat Rovira i Virgili IEEE |
| Starting Page | 259 |
| Ending Page | 262 |
| File Size | 599124 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780388100 |
| DOI | 10.1109/SCED.2005.4659366 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-02-02 |
| Publisher Place | Spain |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Lifetime estimation Surface fitting Surface resistance Doping profiles Glass Solids Photovoltaic cells Fabrication Temperature distribution Current density |
| Content Type | Text |
| Resource Type | Article |
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