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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yanbin Li Gang Lei Shao, K.R. |
| Copyright Year | 2008 |
| Description | Author affiliation: Coll. of Electr. & Electron. Eng., Huazhong Univ. of Sci. & Technol., Wuhan (Yanbin Li; Gang Lei; Shao, K.R.) |
| Abstract | This paper presents a modeling of lateral electrostatic comb drive actuator and develops a 2D finite element model using reduced order modeling (ROM) principles to analyze the coupled field. This technique reduces the comb drive to a group of equivalent lumped parameters finite elements which capture the device behavior. Finally, Simulation results are validated using an analytical approach, both methods give very similar results. The strongly coupled field problem is effectively solved by reduced order modeling (ROM) and the relation between structure parameters and the electrostatic force and the displacement is discussed. |
| Starting Page | 1 |
| Ending Page | 5 |
| File Size | 295025 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781889335384 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-09-28 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | TSI ENTERPRISES, INC. |
| Subject Keyword | Coupled mode analysis Electrostatic analysis Electrostatic actuators Fingers Read only memory Drives Finite element methods Micromechanical devices Equations Reduced order systems |
| Content Type | Text |
| Resource Type | Article |
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