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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Gaura, E. Newman, R. |
| Copyright Year | 2006 |
| Description | Author affiliation: Coventry University, United Kingdom (Gaura, E.; Newman, R.) |
| Abstract | This tutorial is the first presented by the authors of Smart MEMS and Sensor Systems (2006, Imperial College Press). The aim of the tutorial is to present the directions of research, development and technological evolution for Electro Mechanical Microsystems, and in particular microsensors. The development of MEMS devices has generally followed a bottom up methodology, reaching now a stage where the capabilities of the devices could be used much more effectively in systems designed from the top down to include them. A holistic view of the requirements of MEMS based systems and the capabilities of the microdevices must be taken if such systems are to deliver the promise that was expected. This tutorial provides the integrative perspective required for workers in all areas of the field, to enable them to appreciate the system level design issues leading to breakthrough sensing applications. |
| File Size | 739571 |
| File Format | |
| ISBN | 1424404657 |
| DOI | 10.1109/ICMA.2006.257419 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2006-06-25 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromechanical devices Sensor systems Intelligent sensors Wireless sensor networks Microsensors Microelectromechanical devices System-level design Large-scale systems |
| Content Type | Text |
| Resource Type | Article |
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