NDLI: An AFM based nanomanipulation system with 3D nano forces feedback

Content Provider	IEEE Xplore Digital Library
Author	Xiaojun Tian Niandong Jiao Lianqing Liu Yuechao Wang Ning Xi Wenjung Li Zaili Dong
Copyright Year	2004
Abstract	In the AFM based nanomanipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almiost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the inter:active nano forces between the AFM probe tip and the object or substrate in nanomanipulation. In addition, for a sample-scanning AFM even with a strain gauge position feedback sensor for x-y close-loop displacement control of sample stage, scanning size error will still be generated, which is destructive to lateral positioning accuracy of AFM probe. For improving probe lateral positioning accuracy, an error compensating method is adopted according to system error quantitative annlysis based on the authors¿ previous work. With 3D nano force:s sensing through a hapticlforce device and probe positioning acciuracy improvement, the efficiency and accuracy of nano manipulation can be significantly improved. Experiments are prewnted to verify the effectiveness of the nanomanipulation system.
Starting Page	18
Ending Page	22
File Size	477318
Page Count	5
File Format	PDF
ISBN	0780387481
DOI	10.1109/ICIMA.2004.1384154
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-08-26
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Force feedback Probes Atomic force microscopy Force sensors Haptic interfaces State feedback End effectors Capacitive sensors Nanoscale devices Automation
Content Type	Text
Resource Type	Article

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