NDLI: Tunable Workfunction for Fully Silicied Gates (FUSI) and Proposed Mechanisms

Content Provider	IEEE Xplore Digital Library
Author	Kim, Y.H. Cabral, C. Gusev, E.P. Gignac, L. Gribelyuk, M. Ieong, M.
Copyright Year	2006
Description	Author affiliation: IBM T.J. Watson Res. Center, Yorktown Heights, NY (Kim, Y.H.; Cabral, C.)
Abstract	We present fully silicided gate (FUSI) work function modulation and mechanisms using different NiSi alloys as well as different phases $(Ni_{31}Si_{12}$ and $Ni_{rich}-Pt-Si).$ It is shown that the interface layer between gate silicide and dielectric is the key to modulate the work function due to Fermi level pining on HfSiO and $HfO_{2}.$ Ge, Yb, Pt, and Al were fully explored to identify good candidates for N and PFET. A ~400meV work function shift was achieved toward the conduction band edge using NiAlSi demonstrating a mobility of 300 $cm_{2}/Vs$ at peak, matching NiSi control devices on $Hf_{x}SiO_{y}.$ $Ni_{rich}PtSi$ has shown 4.85eV work function and good mobility. Different gate materials were fully explored to understand the mechanism of work function modulation depending on the dielectrics. It was found that the work function of metal rich silicides are strongly dependent on the pure metal work function and it can be changed by controlling the number of metal atoms which are available at the interface
Starting Page	1
Ending Page	2
File Size	2455483
Page Count	2
File Format	PDF
ISBN	1424401814
ISSN	1524766X
DOI	10.1109/VTSA.2006.251094
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-04-24
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicides Phase modulation Electrodes Hafnium oxide High-K gate dielectrics Capacitance Channel bank filters Performance loss Conducting materials Dielectric materials
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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