NDLI: A novel sub-50 nm multi-bridge-channel MOSFET (MBCFET) with extremely high performance

Content Provider	IEEE Xplore Digital Library
Author	Sung-Young Lee Eun-Jung Yoon Sung-Min Kim Chang Woo Oh Ming Li Jeong-Dong Choi Kyoung-Hwan Yeo Min-Sang Kim Hye-Jin Cho Sung-Hwan Kim Dong-Won Kim Donggun Park Kinam Kim
Copyright Year	2003
Description	Author affiliation: R&D Center, Samsung Electron. Co., Kyunggi-Do, South Korea (Sung-Young Lee; Eun-Jung Yoon; Sung-Min Kim; Chang Woo Oh; Ming Li; Jeong-Dong Choi; Kyoung-Hwan Yeo; Min-Sang Kim; Hye-Jin Cho; Sung-Hwan Kim; Dong-Won Kim; Donggun Park; Kinam Kim)
Abstract	We demonstrate highly manufacturable sub-50 nm MBCFET with the I/sub on/ of 4.26 mA/ /spl mu/m at V/sub DD/ = 1.2V, which is the best performance ever reported. This excellent performance of the MBCFET is resulted from the vertically stacked channels and enhanced mobility. It has been fabricated on bulk Si substrate by using the multiple epitaxial growth of SiGe/Si/SiGe/Si layers and damascene gate process. It has structural and electrical merits in scaling and process integration.
Starting Page	200
Ending Page	201
File Size	214509
Page Count	2
File Format	PDF
ISBN	0780382897
DOI	10.1109/VLSIT.2004.1345478
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-06-15
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	MOSFET circuits Substrates Bridge circuits Fabrication Etching Silicon compounds Epitaxial growth Manufacturing processes Silicon on insulator technology Silicon germanium
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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