NDLI: High-voltage electron-beam-induced-current imaging of microdefects in laser diodes and MESFETs

Content Provider	IEEE Xplore Digital Library
Author	Hwang, D.M. DeChiaro, L. Wang, M.C. Lin, P.S.D. Zah, C.E. Ovadia, S. Lee, T.P. Darby, D. Tkachenko, Y.A. Hwang, J.C.M.
Copyright Year	1994
Description	Author affiliation: Bellcore, Red Bank, NJ, USA (Hwang, D.M.; DeChiaro, L.; Wang, M.C.; Lin, P.S.D.; Zah, C.E.; Ovadia, S.; Lee, T.P.)
Abstract	We have developed a new device characterization technique called High-Voltage Electron-Beam-Induced-Current (HV-EBIC). This technique marks a breakthrough in the art of EBIC, providing a much improved probing depth and spatial resolution without destructive sample preparation procedures. It can probe structures 0.5 /spl mu/m underneath the surface with a spatial resolution better than 0.1 /spl mu/m. It serves as the only nondestructive technique that reveals defect distribution and junction locations with sufficient spatial resolution, and therefore has many potential applications in semiconductor device development, manufacturing, and failure analysis. In this article, we describe the operation principles of HV-EBIC and its advantages over the conventional low-voltage EBIC using Monte Carlo simulation. To demonstrate the power of HV-EBIC, we present some preliminary results on the study of degradation mechanisms in In/sub 0.2/Ga/sub 0.8/As strained quantum-well lasers, and in GaAs metal-semiconductor field-effect transistors (MESFETs).
Starting Page	470
Ending Page	477
File Size	1040596
Page Count	8
File Format	PDF
ISBN	0780313577
DOI	10.1109/RELPHY.1994.307797
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1994-04-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Spatial resolution High-resolution imaging Art Probes Semiconductor devices Semiconductor device manufacture Failure analysis Degradation Quantum well lasers Gallium arsenide
Content Type	Text
Resource Type	Article

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