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Content Provider | IEEE Xplore Digital Library |
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Author | Teramoto, A. Inatsuka, T. Obara, T. Akagawa, N. Kuroda, R. Sugawa, S. Ohmi, T. |
Copyright Year | 2014 |
Description | Author affiliation: Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan (Inatsuka, T.; Obara, T.; Akagawa, N.; Kuroda, R.) || New Ind. Creation Hatchery Center, Tohoku Univ., Sendai, Japan (Teramoto, A.; Sugawa, S.; Ohmi, T.) |
Abstract | Time-dependent characteristics of stress induced leakage current (SILC) for the 5.7 and 7.7 nm oxides were evaluated to detect the random telegraph signal (RTS) of gate leakage current. The leakage current from the RTS of IG was extracted. Each current value extracted from RTS of SILC indicates the absolute current of individual localized leakage spot. The results indicate that the absolute value at individual leakage spot can be analyzed by this method, and this evaluation method is useful for the development of process and design technologies for highly reliable MOS devices. |
File Size | 1757743 |
File Format | |
ISBN | 9781479933174 |
ISSN | 19381891 |
DOI | 10.1109/IRPS.2014.6861144 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2014-06-01 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Leakage currents Stress MOSFET Current measurement Capacitors Logic gates Switching circuits localized path tunnel oxide stress induced leakage current electric stress random telegraph signal |
Content Type | Text |
Resource Type | Article |
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