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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Annamalai, N. K. Islam, S.M.R. |
| Copyright Year | 1986 |
| Description | Author affiliation: Clarkson University, Potsdam, NY 13676 (Islam, S.M.R.) || Rome Air Development Center, Solid State Sciences Division, Hanscom AFB, MA 01731 (Annamalai, N. K.) |
| Abstract | An a.c. conductance technique using a lock-in-amplifier (LIA) is described. The conductance technique is a non-destructive technique and uses the die as a sensor. Our experiments and theoretical calculations revealed that the moisture-induced conductance variation is 10 to 400% whereas the moisture-induced capacitance variation is 0 to 20%. Hence, even though capacitance and conductance values were measured, only conductance variations are reported. A circuit model has been developed to explain the observed experimental behavior. This technique is thus superior to capacitance technique in deterining the low levels of moisture (<5000ppmu) in IC packages. The selective condensation problem experienced in the Harris or Al2O3 sensors is non existent in the conductance technique. Since the applied voltage in the conductance method is ~l00mV, there is no dissociation of water into hydrogen and oxygen, as is possible in the case of Harris sensors. Further, the moisture content determined by this non-destructive technique correlates well with the residual gas analysis (RGA) by the mass spectrometer. This technique is non-destructive, reliable, rapid and suitable for in-line testing. |
| Starting Page | 61 |
| Ending Page | 68 |
| File Size | 7877153 |
| Page Count | 8 |
| File Format | |
| ISSN | 07350791 |
| DOI | 10.1109/IRPS.1986.362113 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1986-04-01 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Moisture Integrated circuit packaging Voltage Semiconductor device measurement Diodes Capacitance measurement Calibration Frequency Temperature sensors Pins |
| Content Type | Text |
| Resource Type | Article |
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