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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Martin, Byron D. |
| Copyright Year | 1976 |
| Description | Author affiliation: IBM System Products Division, East Fishkill, Hopewell Junction, New York 12533 (Martin, Byron D.) |
| Abstract | An in-line laser interferometer was developed to study motions during ultrasonic bonding. The interferometer consists of a 2 milliwatt He-Ne laser with output mirrors at both ends, a lens with adjustment apparatus, and a photodiode detector. The detector output is displayed on an oscilloscope. The lens permits the beam to be focussed to a spot diameter less than 25 micrometers. The beam is focussed on a periodically moving target which results in a fringe pattern displayed on the oscilloscope. Peak-to-peak displacements up to 50 micrometers have been measured with an accuracy of ± 25 nanometers. The fringe pattern observed may be described in terms of a Michelson interferometer. The experimentally observed fringe pattern corresponds exactly to the theoretical plot using the Michelson interferometer. Peak-to-peak displacements are determined by counting the number of fringes on the oscilloscope. |
| Starting Page | 82 |
| Ending Page | 85 |
| File Size | 4845326 |
| Page Count | 4 |
| File Format | |
| ISSN | 07350791 |
| DOI | 10.1109/IRPS.1976.362725 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1976-04-20 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical design Bonding Laser beams Motion measurement Ultrasonic variables measurement Oscilloscopes Optical beam splitting Wires Length measurement Mirrors |
| Content Type | Text |
| Resource Type | Article |
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