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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yuan-Ta Hsieh Sheng-Hsiang Tseng Chiao-Li Fang Jian-Fu Wu Hann-Huei Tsai Ying-Zong Juang |
| Copyright Year | 2015 |
| Description | Author affiliation: Nat. Chip Implementation Center, Hsinchu, Taiwan (Yuan-Ta Hsieh; Sheng-Hsiang Tseng; Chiao-Li Fang; Jian-Fu Wu; Hann-Huei Tsai; Ying-Zong Juang) |
| Abstract | Complementary metal-oxide-semiconductor micro-electromechanical system (CMOS MEMS) resonators provide considerable advantages in size, cost, and power consumption over their crystal-based counterparts. However, the need for external high bias-voltage to drive the MEMS structure has limited the application of CMOS MEMS in portable electronic applications. This paper proposes an ultra-low power boost DC-DC converter with integrated MEMS resonator. The proposed DC-DC converter and MEMS resonator are integrated into a single chip, and the high bias-voltage required for the MEMS resonator is self-provided. The substantial reduction in the size of the resulting device as well as its low power requirements make it ideal for portable applications. A working prototype of the device was fabricated using a UMC 0.18-μm 60-V bipolar-CMOS-DMOS with a MEMS post-process. Measurement results show that the power dissipation of the boost DC-DC converter is less than 15 μW under various input voltages. Comparisons of high bias-voltage from an external supply with an internal DC-DC converter demonstrate the performance of the design. A preserved reset signal at a different clock frequency also verifies the resistance of the proposed design to process variation. |
| Starting Page | 711 |
| Ending Page | 714 |
| File Size | 1480142 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479944026 |
| ISSN | 21645264 |
| DOI | 10.1109/PEDS.2015.7203392 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-06-09 |
| Publisher Place | Australia |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromechanical devices DC-DC power converters Power dissipation CMOS integrated circuits Semiconductor device measurement Resistors Low-power electronics |
| Content Type | Text |
| Resource Type | Article |
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