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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kap-Duk Song Jung-II Bang Sang-Rok Lee Yang-Rye Lim Sang-Mun Lee Byung-Su Joo Yun-Su Lee Takashi Oyabu Duk-Dong Lee |
| Copyright Year | 2005 |
| Description | Author affiliation: Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., South Korea (Kap-Duk Song; Jung-II Bang; Sang-Rok Lee; Yang-Rye Lim; Sang-Mun Lee; Byung-Su Joo; Yun-Su Lee) |
| Abstract | We report on the fabrication and characteristics of micro hot wire sensor with Borofloat glass membrane on diaphragm by using anodic bonding. Borofloat membrane was thermally stable and strong for mechanical stress. The four types of sensing materials SnO/sub 2/, In/sub 2/O/sub 3/ and mixed oxide of adequate ratio with these two type metal oxide semiconductor were prepared by thermal evaporation method and then oxidized at 600 /spl deg/C, 3 hrs. Various sensing materials for NO/sub x/, CO, etc. were prepared. And then the response characteristics were investigated. For mixed oxide semiconductor with Sn and In oxide, these showed the high sensitivity for NO/sub x/ and CO gas. And by using the Borofloat glass substrate, the power consumption was much reduced about 60 mW in condition of the best sensitivity. |
| Sponsorship | Korean Sensors Soc |
| Starting Page | 1903 |
| Ending Page | 1906 |
| File Size | 620730 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780389948 |
| DOI | 10.1109/SENSOR.2005.1497469 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-06-05 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Wire Thermal sensors Glass Biomembranes Mechanical sensors Sensor phenomena and characterization Semiconductor materials Fabrication Bonding Thermal stresses |
| Content Type | Text |
| Resource Type | Article |
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