NDLI: Micro bellow actuators

Content Provider	IEEE Xplore Digital Library
Author	Xing Yang Yu-Chong Tai Chih-Ming Ho
Copyright Year	1997
Description	Author affiliation: Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA (Xing Yang)
Abstract	We report here a novel micromachined bellow-style actuator (microbellow) which uses a smaller real estate but is capable of larger deflections compared to a flat membrane of the same size. In this first demonstration, three-layer silicon nitride microbellows have been successfully fabricated by using polysilicon/TMAH sacrificial layer etching technology. Inside the bellows, runs of sacrificial layer are designed at the joints of every two layers to improve the boundary conditions (i.e., to reduce the stress concentration). By doing this, a 5 times improvement in burst pressure has been achieved. The large deflection of the bellow has also been demonstrated. As an example, a 800 /spl mu/m diameter circular microbellow made of 1.2 /spl mu/m thick silicon nitride can deflect more than 50 /spl mu/m in the center compared to only 13 /spl mu/m for a flat membrane of the same dimensions. Thermopneumatic actuation of the microbellow is also demonstrated.
Starting Page	45
Ending Page	48
File Size	541072
Page Count	4
File Format	PDF
ISBN	0780338294
DOI	10.1109/SENSOR.1997.613577
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-06-19
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bellows Actuators Biomembranes Silicon Etching Fabrication Microvalves Aerospace engineering Boundary conditions Stress
Content Type	Text
Resource Type	Article

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