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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Clarkson, J.P. Fauchet, P.M. Rajalingam, V. Hirschman, K.D. |
| Copyright Year | 2005 |
| Description | Author affiliation: Rochester Univ., NY (Clarkson, J.P.; Fauchet, P.M.) |
| Abstract | Integration of electrical and fluidic systems for the design and fabrication of a system-on-chip (SOC) capable of sensing various liquid phase solvents is reported. A monolithic integration strategy makes use of macroporous silicon (MPS) as a gateway to interface the electrical and fluidic domains. In doing this, the MPS material, acting as a sensing membrane, is used in a flow-through structure to transport an analyte, or fluidic sample under investigation, from fluidic channels on one side of the chip to sensing electrodes on the other. A fluid/oxide/semiconductor interface results in the modulation of a space charge region in the semiconductor where real-time measurements are used to detect and distinguish between various solvents. To date, the fluidic system has delivered liquid sample sizes as small as 2 mul. Selected test solvents, i.e. acetone, ethanol, isopropyl alcohol, methanol, and toluene have generated a measured change in capacitance up to 11% and have been detected with specificity. The sensing device has a high degree of reusability and does not require heating or other solvent drive-out methods often necessitated in other sensing devices |
| File Size | 382843 |
| File Format | |
| ISBN | 0780390563 |
| DOI | 10.1109/ICSENS.2005.1597650 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-10-30 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Silicon Solvents Phase detection Fabrication System-on-a-chip Monolithic integrated circuits Semiconductor materials Biomembranes Electrodes Space charge |
| Content Type | Text |
| Resource Type | Article |
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