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Content Provider | IEEE Xplore Digital Library |
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Author | Ruther, P. Bartholomeyczik, J. Trautmann, S. Wandt, M. Paul, O. Dominicus, W. Roth, R. Seitz, K. Strauss, W. |
Copyright Year | 2005 |
Description | Author affiliation: IMTEK, Freiburg Univ. (Ruther, P.; Bartholomeyczik, J.; Trautmann, S.) |
Abstract | This paper reports the successful fabrication and characterization of a novel three-axial silicon force sensor based on piezoresistive transducers and its application in dimensional metrology. The innovative sensor design enables a distinct reduction of the critical ratio Sz $}/S_{x}$ of out-of-plane stiffness $S_{z}$ to in-plane stiffness $S_{x}.$ In contrast to existing single-chip sensors with $S_{z}/S_{x}$ = 30 a ratio of 4 is achieved which improves the detection of inclined surfaces. The sensor consists of a flexible cross-structure realized by deep reactive ion etching. The arms of the cross-structure are connected to a silicon frame and to the central part of the cross-structure through silicon membranes hinges. A stylus with a probing sphere is used as the tactile element. Forces applied to the sphere are transferred into a deflection of the cross-structure. The respective stress values in the membranes are detected using implanted piezoresistors. The sensor element is applied in dimensional metrology of micro components with lateral dimensions larger than 100 mum. The lateral resolution of the sensor element is 10 nm |
File Size | 1107201 |
File Format | |
ISBN | 0780390563 |
DOI | 10.1109/ICSENS.2005.1597872 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2005-10-30 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Piezoresistance Silicon Force sensors Metrology Biomembranes Fabrication Transducers Sensor phenomena and characterization Etching Arm |
Content Type | Text |
Resource Type | Article |
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