NDLI: A high-sensitivity piezoresistive gyroscope with torsional actuation and axially-stressed detection

Content Provider	IEEE Xplore Digital Library
Author	Zhaohui Song Xuemeng Chen Shusen Huang Yuelin Wang Jiwei Jiao Xinxin Li
Copyright Year	2003
Description	Author affiliation: State Key Lab. of Transducer Technol., Shanghai Inst. of Microsystem & Inf. Technol., China (Zhaohui Song; Xuemeng Chen; Shusen Huang; Yuelin Wang; Jiwei Jiao; Xinxin Li)
Abstract	A piezoresistive gyroscope is presented, which is excited by electrostatic force and detected piezoresistively. With axially deformed tiny beams serving as piezoresistors to detect coriolis acceleration, the sensitivity can be much improved. With a four-terminal piezoresistive sensing element monitoring the driving-mode output versus temperature, the gyroscope temperature drift can be eliminated effectively. So the gyroscope enables a combination of self-compensation temperature drift and high sensitivity, and the gyroscope sensitivity will be so high as 3.07mV/7s/5V. Besides, the gyroscope can operate at atmosphere, as its high Q value is about 1000 in detection-mode. To verify the axially stressed detection scheme and develop fabrication technology, the detection part of the gyroscope has been fabricated in silicon-on-insulator (SOI) wafer by bulk micromachining techniques including deep-reactive-ionic-etch (DRIE). Testing results show both high resonant frequency of 1115Hz for operation and high sensitivity of 106mV/g/5V for detection. The detection scheme is proved to effectively improve the gyroscope sensitivity.
Sponsorship	IEEE Sensors Council
Starting Page	457
Ending Page	460
File Size	312403
Page Count	4
File Format	PDF
ISBN	0780381335
DOI	10.1109/ICSENS.2003.1278979
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-22
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Piezoresistance Gyroscopes Temperature sensors Silicon on insulator technology Electrostatics Particle beams Piezoresistive devices Acceleration Monitoring Atmosphere
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

A silicon micromachined vibrating gyroscope with piezoresistive detection and electromagnetic excitation

Sensitivity analysis for a piezoresistive rotary movement micro gyroscope

A Microgyroscope With Piezoresistance for Both High-Performance Coriolis-Effect Detection and Seesaw-Like Vibration Control

A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring

A high temperature pressure sensor with /spl beta/-SiC piezoresistors on SOI substrates

Structure design and optimization of high-g piezoresistive accelerometer

A silicon pressure sensor with stainless diaphragm for high temperature and chemical application

Sensitivity enhancement of piezoresistive micro acceleration sensors with Nanometer Stress Concentration Regions on sensing elements

Review on diamond based piezoresistive sensors

A high-sensitivity piezoresistive gyroscope with torsional actuation and axially-stressed detection

Similar Documents

A silicon micromachined vibrating gyroscope with piezoresistive detection and electromagnetic excitation

Sensitivity analysis for a piezoresistive rotary movement micro gyroscope

A Microgyroscope With Piezoresistance for Both High-Performance Coriolis-Effect Detection and Seesaw-Like Vibration Control

A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring

A high temperature pressure sensor with /spl beta/-SiC piezoresistors on SOI substrates

Structure design and optimization of high-g piezoresistive accelerometer

A silicon pressure sensor with stainless diaphragm for high temperature and chemical application

Sensitivity enhancement of piezoresistive micro acceleration sensors with Nanometer Stress Concentration Regions on sensing elements

Review on diamond based piezoresistive sensors

A high-sensitivity piezoresistive gyroscope with torsional actuation and axially-stressed detection