NDLI: CAD design of mask compensation patterns

Content Provider	IEEE Xplore Digital Library
Author	Tellier, C.
Copyright Year	2003
Description	Author affiliation: LCEP, ENSMM, Besancon, France (Tellier, C.)
Abstract	The wet micromachining of silicon mechanical structures for sensors is a widely used process. But compensation of the corner undercutting is frequently needed. Hence a new method to design compensation mask patterns is proposed here that is based on a numerical simulation. New results on the convex corner undercutting in anisotropic etching of (100), [110] and (hhl) silicon are presented for TMAH and KOH etchants. Simulations of the convex undercutting are performed using the simulator TENSOSIM. For this purpose new software applications are developed that allow us to work with more complex mask patterns. Compensating beams are then studied for various orientations. Differently shaped masks patterns are numerically tested (influence of shape, of relative dimensions and of misalignment of mask patterns) showing that the simulator TENSOSIM is a very convenient CAD tool to design compensation structures for convex corner micromachining in silicon.
Sponsorship	IEEE Sensors Council
Starting Page	517
Ending Page	522
File Size	420412
Page Count	6
File Format	PDF
ISBN	0780381335
DOI	10.1109/ICSENS.2003.1278992
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-22
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Design automation Silicon Micromachining Etching Mechanical sensors Design methodology Numerical simulation Anisotropic magnetoresistance Application software Testing
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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