NDLI: Dynamic ISD scheme for the AVM system

Content Provider	IEEE Xplore Digital Library
Author	Yao-Sheng Hsieh Fan-Tien Cheng Chun-Fang Chen Jhao-Rong Lyu Ting-Yu Lin
Copyright Year	2015
Description	Author affiliation: Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan (Yao-Sheng Hsieh; Fan-Tien Cheng; Chun-Fang Chen; Jhao-Rong Lyu; Ting-Yu Lin)
Abstract	Reducing the sampling rate to as low as possible is a high priority for many factories to reduce production cost. Automatic-Virtual-Metrology (AVM) based Original Intelligent Sampling Decision (Original ISD) scheme had been previously developed for reducing the sampling rate and sustaining the VM accuracy. However, the desired sampling rate of the Original ISD scheme is fixed and set manually. Hence, whenever the VM accuracy gets worse, it cannot dynamically increase the desired sampling rate in the Original ISD scheme. As a consequence, it would take more time to collect enough samples for improving the VM accuracy. Moreover, when the VM accuracy performs well all the time, it cannot automatically decrease the desired sampling rate in Original ISD, which may result in unnecessary waste. Accordingly, this paper proposes a preliminary study of a Dynamic ISD scheme to dynamically and automatically modify the sampling rate online and in real time. The Dynamic ISD scheme can monitor the VM accuracy on line as well as update the VM models in real time for maintaining the VM accuracy when the VM accuracy becomes poor. Also, the Dynamic ISD scheme can automatically reduce the sampling rate while the VM accuracy performs well.
Starting Page	2060
Ending Page	2065
File Size	749197
Page Count	6
File Format	PDF
e-ISBN	9781479969234
DOI	10.1109/ICRA.2015.7139469
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-26
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accuracy Metrology Semiconductor device modeling Heuristic algorithms Current measurement Data models Production Dynamic Intelligent Sampling Decision (Dynamic ISD) Scheme Automatic Virtual Metrology (AVM) System Original Intelligent Sampling Decision (Original ISD) Scheme
Content Type	Text
Resource Type	Article

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